Regensburg 2013 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 11: Poster Session I: Application of thin films; Ion beam induced surface patterns; Ion and electron beam induced processes; Micro- and nanopatterning (jointly with O)
DS 11.21: Poster
Montag, 11. März 2013, 17:00–20:00, Poster B1
Scanning Tunnelling Spectroscopy of FIB-induced Local Phase Changes in Tetrahedral Amorphous-Carbon — •Frederik Klein1, Peter Philipp2, Lothar Bischoff2, and Thomas Mühl1 — 1Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden — 2Institut für Ionenstrahlphysik und Materialforschung, Helmholtz-Zentrum Dresden-Rossendorf
Ion irradiation of tetrahedral amorphous-carbon leads to both an ion implantation and a local phase change of the carbon. The latter is equivalent to an increase of the carbon sp2/sp3 bond ratio. It is caused by the deposition of the ion energy and leads to an increased electrical conductivity. We perform spatially resolved scanning tunneling spectroscopy in order to investigate the impact of different ion species (Ga, Si, Ge, Au). A direct contribution of the implanted metal will be carefully considered.