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DS: Fachverband Dünne Schichten
DS 13: Poster Session III: Layer properties: electrical, optical and mechanical properties; Thin film characterization: structure analysis and composition (XRD, TEM; XPS, SIMS, RBS..)
DS 13.1: Poster
Montag, 11. März 2013, 17:00–20:00, Poster B1
Characterisation of YSZ thin films deposited by RF sputtering — •Daniel Reppin1, Markus Piechotka1, Jens Peter Eufinger2, Benjamin Pachner1, Angelika Polity1, Peter J. Klar1, Bruno K. Meyer1, and Jürgen Janek2 — 11. Physikalisches Institut, Justus-Liebig-Universität, Heinrich-Buff-Ring 16, 35392 Giessen — 2Physikalisch-Chemisches Institut, Justus-Liebig-Universität, Heinrich-Buff-Ring 58, 35392 Giessen
Yttria-stabilised zirconia (YSZ) is a technically widely used oxygen ion conductor employed for example in oxygen sensors and solid oxide fuel cells. For these applications the film properties such as the crystal structure and ion conductivity are of major interest. YSZ thin films were deposited from a ceramic target with 9.5 mol% Y2O3 by RF sputtering on silicon (004) and fused silica substrats. The films were investigated by 4-circle XRD measurements to determine whether the crystal structure is cubic or tetragonal. Scanning electron microscopy was used to inspect the grain size of the films. Impedance spectroscopy measurements were performed to quantify the oxygen ion conduction.