Regensburg 2013 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 13: Poster Session III: Layer properties: electrical, optical and mechanical properties; Thin film characterization: structure analysis and composition (XRD, TEM; XPS, SIMS, RBS..)

DS 13.6: Poster

Montag, 11. März 2013, 17:00–20:00, Poster B1

Synthesis, microstructure and local electronic conductivity of platinum/titanium oxide contacts — •Marian Bongers, Astrid Pundt und Carsten Nowak — Institut fuer Materialphysik, Friedrich-Hund-Platz 1, 37077 Goettingen, Germany

Pt/TiO_x Schottky contacts are of interest for surface chemical reactions as they allow measuring hot electrons, show catalytic activity and exhibit a change in there electronic characteristics under different chemical ambient. As these effects depend on the crystallographic orientation, a careful characterization of the microstructure is required.
Here we present studies on the growth of TiO₂/Pt double layers on MgO <100> single crystals. Layers with several hundred nanometers thickness were prepared by reactive atom beam sputter deposition under O₂ and Xe atmosphere. The layers were structurally characterized by XRD, EBSD and AFM. For optimized synthesis temperature the investigations revealed a preferred <100> orientation of the Pt layer with lateral grain size of the order of 100 µm. For the TiO₂ layers a polycrystalline microstructure was observed. Local I-V-characteristics were measured with conductive AFM and tungsten tips of µm size, revealing rectifying behavior.
Further, investigations on the influence of the deposition temperature and thermal annealing on the quality of the TiO₂ layers are presented. The influence of a chemical gas ambient on the I-V-characteristics of the synthesized Pt/TiO_x contacts will be discussed.
Fincanial support by the DFG via projects PU131/9 and SFB602 is gratefully acknowledged.