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DS: Fachverband Dünne Schichten

DS 2: Focus Session: Ion Beam Induced Surface Patterns I

DS 2.6: Topical Talk

Montag, 11. März 2013, 12:15–12:45, H32

Redeposition during ion-beam erosion — Nils Anspach, Christian Diddens, Marc Osthues, and •Stefan Linz — Institut für Theoretische Physik, WWU Münster

Redeposition, i.e. the effect that eroded target particles generated by ion-beam erosion processes can, at least partially, attach to the target surface again, has been scarcely studied in the past. This inherently non-local effect can have substantial impact on the nano-scale evolution of the surface morphology of the eroded target. Using an appropriately tailored one-dimensional solid-on-solid model [1] and a two-dimensional continuum formulation [2] for redeposition processes, we investigate their generic physical properties on the nanoscale. Most significantly, by combining the redeposition model with standard models for erosion, we are able to verify that redeposition can potentially stabilize well-ordered hexagonal nanostructures, as also detected in low-energy ion-beam erosion experiments on semiconductors.

[1] N Anspach, S Linz, J. Stat. Mech. 2012, P06012; 2010, P06023

[2] C Diddens, S Linz, in preparation