Regensburg 2013 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 27: Thin Film Characterization: Structure Analysis and Composition (XRD, TEM, XPS, SIMS, RBS,...) I
DS 27.2: Vortrag
Mittwoch, 13. März 2013, 17:30–17:45, H32
Gold Cluster Growth Kinetics during Sputter Deposition — •Matthias Schwartzkopf1, Adeline Buffet1, Volker Körstgens2, Ezzeldin Metwalli2, Kai Schlage2, André Rothkirch1, Monika Rawolle2, Jan Perlich1, Gerd Herzog1, Berit Heidmann1, Ralf Röhlsberger1, Peter Müller-Buschbaum2, Rainer Gehrke1, and Stephan V. Roth1 — 1DESY, Notkestr. 85, D-22607 Hamburg, Germany — 2TU München, James-Franck-Str. 1, D-85747 Garching, Germany
The adjustment of size-dependent catalytic, electrical and optical properties of gold cluster assemblies is a very significant issue in modern applied nanotechnology. We investigate in situ the growth kinetics of gold nanostructures to a gold layer during magnetron sputter deposition with high time resolution by means of grazing incidence small-angle X-ray scattering (GISAXS). The high time resolution in the millisecond regime allows the determination of kinetics of initial nucleation and subsequent cluster growth during sputter deposition at deposition rates relevant for industrial manufacturing processes. Morphological parameters related to the growth of metallic layers such as cluster size, correlation distance and surface coverage are deduced from a general model solely based on geometrical assumptions. The temporal evolution of the model parameters reveals four stages of gold cluster growth, namely initial nucleation, diffusion-mediated coalescence, adsorption-driven cluster growth and finally grain growth above the percolation threshold. Furthermore, our study opens up the opportunity to deduce the wetting behaviour of gold nanoclusters on solid substrates.