Regensburg 2013 – scientific programme

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DS: Fachverband Dünne Schichten

DS 32: Poster Session IV: Atomic layer deposition; Organic thin films; Organic Electronics and Phototovoltaics; Organic Materials for Spintronics - from spinterface to devices; Thin film photovoltaic materials and solar cells

DS 32.51: Poster

Thursday, March 14, 2013, 17:00–20:00, Poster B2

Flash Lamp Annealing of Spray Coated Silicon Nanoparticle Films — •Daniel Bülz, Falko Seidel, Iulia G. Toader, Ronny Fritzsche, Benjamin Büchter, Alexander Jakob, Roy Buschbeck, Michael Mehring, Heinrich Lang, and Dietrich R. T. Zahn — TU Chemnitz, 09126 Chemnitz, Germany

Flash lamp annealing (FLA) of spray coated silicon nanoparticles (Si NP) is considered as a low cost alternative for thin film solar cell fabrication. In this work the effect of FLA on Si NP films produced with varying number of spray cycles is investigated by Raman spectroscopy, scanning electron microscopy, and electrical characterisation. The Si NPs are dispersed in ethanol or tetrahydrofuran + di-N-methylpyrrole-silane [H₂Si(NMP)₂], the latter being a silicon precursor. The organosilicon acts as glue between the Si NPs in order to achieve more compact spray coated films. The suspensions are sprayed onto a preheated substrate (molybdenum sheets and hydrogen passivated doped silicon wafers). Then the samples are treated by FLA (energy: 6,37 J/cm²; pulse time: 900 µs; flash lamp system provided by Dresden Thin Film Technology) varying the number of flashes. The whole procedure takes place in a glove box under nitrogen atmosphere to prevent oxidation. A sputtered Ni-Cr alloy reveals ohmic contact behaviour on the FLA treated spray coated Si NP films. It turns out, that adding a silicon precursor to the Si NP suspension improves the effect of FLA on spray coated films. The Si NPs are more contiguous within the films and the amount of fused Si NPs is larger than for films sprayed from pure Si NP suspensions.