Regensburg 2013 – scientific programme

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DS: Fachverband Dünne Schichten

DS 32: Poster Session IV: Atomic layer deposition; Organic thin films; Organic Electronics and Phototovoltaics; Organic Materials for Spintronics - from spinterface to devices; Thin film photovoltaic materials and solar cells

DS 32.60: Poster

Thursday, March 14, 2013, 17:00–20:00, Poster B2

Photoluminescence study of polycrystalline silicon thin films prepared by liquid and solid phase crystallization — •Steffi Schönau, Jörg Rappich, Moshe Weizman, Daniel Amkreutz, and Bernd Rech — Kekuléstr. 5, 12489 Berlin

Polycrystalline silicon thin films were prepared by depositing amorphous or microcrystalline silicon layers onto glass substrates and subsequent crystallization via solid or liquid phase crystallization approaches. Differences in layer morphology and quality were characterized using low temperature photoluminescence (PL) spectroscopy and electron backscatter diffraction spectroscopy. The analysis of spectrally and spatially resolved photoluminescence from poly-Si thin films was shown to be an useful tool for a fast characterization of the sample recombination behavior of light induced charge carriers.