Regensburg 2013 – scientific programme

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DS: Fachverband Dünne Schichten

DS 32: Poster Session IV: Atomic layer deposition; Organic thin films; Organic Electronics and Phototovoltaics; Organic Materials for Spintronics - from spinterface to devices; Thin film photovoltaic materials and solar cells

DS 32.62: Poster

Thursday, March 14, 2013, 17:00–20:00, Poster B2

Development of a Laser based Zinc oxide treatment for the systematic variation of electro-optical properties — •Erik Schumann^1,2, Stefan Haas², and Jürgen Hüpkes² — ¹Helmholtz- Zentrum Dresden-Rossendorf, D-01314 Dresden, Germany — ²IEK5 - Photovoltaik, Forschungszentrum Juelich GmbH, D-52425 Juelich, Germany

Zinc oxide is a widely used transparent conductive oxide (TCO), e.g. as front contact for thin film solar cells. Though already having a low absorption in the visible spectral range and a good conductivity, magnetron sputtered zinc oxide can be improved to increase the performance of thin film solar cells [1,2]. A laser treatment was developed to improve the electrical and optical properties of this material. The influence of the different process parameters were investigated. In addition, the effect of the ambient atmosphere, i.e. oxygen and nitrogen, were analysed. Different schemes to prevent exposure of zinc oxide to ambient atmosphere during laser treatment will be presented. This work is part of the LIST project (BMU: 0325299). [1] M. Berginski, PhD thesis, RWTH Aachen, FZ Juelich (2007) [2] M. Wimmer et. al., Thin Solid Films 520, 4203 (2012)