Regensburg 2013 – scientific programme
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DS: Fachverband Dünne Schichten
DS 35: Application of Thin Films
DS 35.2: Talk
Friday, March 15, 2013, 09:45–10:00, H8
Hard x-ray focusing below 10 nm by multilayer zone plates fabricated by the combination of pulsed laser deposition and focused ion beam — •Florian Döring1, Christian Eberl1, Tobias Liese1, Felix Schlenkrich1, Volker Radisch1, Hans-Ulrich Krebs1, Anna-Lena Robisch2, Markus Osterhoff2, Sarah Hoffmann2, Matthias Bartels2, and Tim Salditt2 — 1Institut für Materialphysik, University of Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany — 2Institut für Röntgenphysik, University of Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany
In hard x-ray microscopy, one approach for point transmission focusing is to use of multilayer zone plates instead of conventional Fresnel zone plates, which are difficult to prepare with high aspect ratio. Therefore, aperiodic W/Si multilayers were pulsed laser deposited (PLD at 248 nm) with high quality on a W wire with single layer thicknesses according to the zone plate law (width of smallest layer Δr = 5.2 nm). Then, from the coated wires, a lens was fabricated by cutting, transferring on a W-tip and polishing using focused ion beam (FIB). X-ray focusing experiments were performed at the coherence beamline P10 of Petra III, showing a far-field pattern which exhibits the expected high numerical aperture. Measured far-field pattern, the corresponding autocorrelation of the focal intensity distribution as well as a three plane iterative phase reconstruction of the zone plate exit wave are in agreement with a focal width in between 6 and 10nm (FWHM), which compares well with the expected 1.22 Δr = 6.3 nm.