Regensburg 2013 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 35: Application of Thin Films
DS 35.3: Vortrag
Freitag, 15. März 2013, 10:00–10:15, H8
Interface investigation of ion-beam deposited Chromium/ Scandium multilayer mirrors — •Roman Rauhut1,2, Alexander Guggenmos1,2, Samira Hertrich3, Bert Nickel3, Sriram Venkatesan4, Christina Scheu4, Eric M. Gullikson5, Ferenc Krausz1,2, and Ulf Kleineberg1,2 — 1Ludwig-Maximilians-Universität München, Fakultät für Physik, Garching, Germany — 2Max-Planck-Institut für Quantenoptik, Garching, Germany — 3Ludwig-Maximilians-Universität München, Fakultät für Physik, München, Germany — 4Ludwig-Maximilians-Universität München, Fakultät für Chemie, München, Germany — 5Center for X-Ray Optics, Lawrence Berkeley National Lab, Berkeley, USA
The direct observation of electron dynamics in atoms, molecules or on surfaces with a unprecedented temporal precision requires attosecond pulses from High Harmonic Generation (HHG) sources. Shaping, filtering and steering these pulses requires highly efficient XUV optics based in many cases on multilayer mirror technology. This leads to the necessity of developing as perfect interfaces as possible, due to the huge loss in reflectivity from boundary imperfections. We will present a systematic optimization of ion-beam deposited Cr/Sc multilayer mirrors by a variation of ion beam voltages during the deposition process as well as the application of ion-assisted deposition, which leads to the fabrication of highly reflecting multilayer optics in the water window. Experimental results from X-ray reflectometry, spectral ellipsometry and XUV reflectometry measurements as well as TEM cross section images are shown and discussed.