Regensburg 2013 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 18: Lasers and LEDs I
HL 18.4: Vortrag
Montag, 11. März 2013, 15:45–16:00, H16
Implementation of diffractive optical elements into AlGaInP-based vertical-cavity surface-emitting lasers for beam shaping — •Susanne Weidenfeld1, Hendrik Niederbracht1, Thomas Schwarzbäck1, Frederik Schaal2, Christoph Pruss2, Wolfgang Osten2, Michael Jetter1, and Peter Michler1 — 1Institut für Halbleiteroptik und Funktionelle Grenzflächen, University of Stuttgart, Stuttgart, Germany — 2Institut für Technische Optik, University of Stuttgart, Stuttgart, Germany
Vertical-cavity surface-emitting lasers (VCSELs) have all kinds of applications, like in the field of optical data transmission, in optical computer mice, laser printing and sensor applications. The idea is now the development of a compact micro optical device for non-pixelated spatial polarization control of an incoming light field. Here, the red-emitting AlGaInP-based VCSEL will act as a lighting module for a photo-addressable layer. With the monolithic integration of an oxide aperture, the transverse beam profile can be defined. The vertical structure of these lasers and thus the on-wafer processing offers also the opportunity to implement beam shaping optics monolithically in the top surface. The aim of these additional features is the manipulation of the laser beam for special device applications. We present first steps towards integrating a diffractive optical element (DOE) directly into the top mirror of the VCSEL. Different measurements will be presented to determine the optical and electrical characteristics of the VCSEL, especially to analyze the effect of the DOE on the beam profile.