Regensburg 2013 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 74: Quantum dots: Optical properties
HL 74.7: Vortrag
Donnerstag, 14. März 2013, 11:15–11:30, H16
Fabrication of a thin membrane of InP/AlGaInP quantum dots — •Hendrik Niederbracht, Elisabeth Koroknay, Fabian Hargart, Christian Alexander Kessler, Michael Jetter, and Peter Michler — Institut für Halbleiteroptik und Funktionelle Grenzflächen und SCoPE Forschungszentrum, Universität Stuttgart, Deutschland
For applications based on the single photon emission from quantum dots (QDs) like quantum key distribution or quantum communication high collection efficiency is important. An easy way to achieve this is to guide the emission of semiconductor QDs into the direction of the detection by growing distributed Bragg reflectors below the QDs and using optics with a high numerical aperture. But often the setup can limit the use of such objectives. An alternative is offered by very thin samples in combination with solid immersion lenses.
The QD samples are fabricated via metal-organic vapor-phase epitaxy on a (100) GaAs substrate with a 6 degree miscut. The challenge is the fabrication of the thin membrane of InP/AlGaInP QDs. Therefor the sample is glued topside down on Si and afterwards thinned using mechanical and wet chemical methods. Optical measurements on an 80 nm thick sample are carried out in order to proof the single photon emission and the results are compared with an unprocessed reference.