Regensburg 2013 – scientific programme
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HL: Fachverband Halbleiterphysik
HL 92: Poster Session: Structure and transport in organic photovoltaics; Photovoltaics; Impurities/Amorphous semiconductors; New materials
HL 92.6: Poster
Thursday, March 14, 2013, 16:00–20:00, Poster A
Texturization and Passivation of Monocrystalline Silicon Wafers for High-Efficiency Solar Cells — •Jan Kegel1,2, Mathias Mews2, Heike Angermann2, Uta Stürzebecher3, and Bert Stegemann1 — 1Hochschule für Technik und Wirtschaft, Berlin, Germany — 2Helmholtz Zentrum Berlin, Berlin, Germany — 3CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH, Erfurt, Germany
Wet-chemical treatment of crystalline Si wafers for the preparation of heterojunction solar cells are optimized with respect to low reflection losses, low recombination losses and long carrier lifetimes. It is demonstrated that a joint optimization of both saw damage etch and texture etch is necessary to control the optical and electronic properties of the resulting pyramid morphology. Effective surface passivation is achieved by deposition of intrinsic amorphous Si (a-Si:H(i)) layers. We demonstrate that optimized parameters for deposition of a-Si:H(i) on planar wafers can be transferred to the deposition on textured substrates. Moreover, the influence of the deposition temperature on the optical layer properties is elucidated, and the impact of post-deposition plasma-hydrogenation and annealing on the charge carrier lifetime and the implied open-circuit voltage is revealed.