Regensburg 2013 – wissenschaftliches Programm

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MI: Fachverband Mikrosonden

MI 4: Analytische Elektronenmikroskopie

MI 4.5: Vortrag

Montag, 11. März 2013, 16:45–17:00, H5

Recent developments in characterization of ultrafine-grained materials by EBSD — •Florian Heidelbach — Bruker Nano GmbH, Schwarzschildstrasse 12, 12489, Berlin, Germany

Electron BackScatter Diffraction (EBSD) examines the relation between structure and properties of materials by providing quantitative microstructural information of inorganic crystalline materials such as metals, minerals, semiconductors, ceramics, etc. EBSD results can be used to assess the grain size, the grain boundary nature, grain orientation and thus texture. The EBSD technique can also be used to perform phase identification and distribution analysis especially when combined with Energy Dispersive X-Ray Spectroscopy (EDS).

We will show how an advanced combination of EBSD and EDS is a powerful tool to successfully identify the different present phases and separate those creating similar patterns. Recent developments also enable the investigation of nanostructured materials in the scanning electron microscope (SEM) by Transmission Kikuchi Diffraction (TKD). Application examples will demonstrate the high spatial resolution (<10 nm) of this technique compared to conventional EBSD.

This presentation aims to reveal the advantages brought by these new developments while presenting application examples.