Regensburg 2013 – scientific programme

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MI: Fachverband Mikrosonden

MI 6: X-ray Imaging, Holography and Tomography

MI 6.2: Talk

Wednesday, March 13, 2013, 09:45–10:00, H5

OMNY- An Instrument for Ptychographic Nano-Tomography — Mirko Holler, •Jörg Raabe, Ana Diaz, Manuel Guizar-Sicairos, Christoph Quitmann, Andreas Menzel, and Oliver Bunk — Swiss Light Source, Paul Scherrer Institut, 5232 Villigen PSI, Switzerland

OMNY (tOMography Nano crYo stage) is an instrumention project under way at the SLS aiming for 3D nanometric imaging. It uses ptychographic reconstruction of coherent diffraction patterns and tomography to acquire images in 3D. In the final implementation it will be used to image biomaterial, materials science and physics samples. A test-setup is installed at the cSAXS beamline to verify the performance of key components in air and at room temperature. It has produced 2D and 3D-data sets with < 50 nm resolution (2D). A laser interferometer stabilizes the position of the sample with respect to the beam (z) along the x- and y-axis. The position feedback provides a stability < 10 nm and compensates any long term drifts.

We present results on 2D lithographic test patterns to specify resolution, drift etc. and on integrated circuits to demonstrate the potential of the instrument.