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MM: Fachverband Metall- und Materialphysik
MM 15: Poster Session
MM 15.21: Poster
Montag, 11. März 2013, 18:00–20:00, Poster E
Influence of the sputter parameters on surface segregation and silver ion release properties of reactively sputtered Ag/TiOx nanocomposites — •Jian Xiong1, Vladimir Zaporojtchenko1, Thomas Strunskus1, Ulrich Schürmann2, Lorenz Kienle2, Frank Lehmann3, and Franz Faupel1 — 1Institute for Materials Science-Multicomponents Materials, CAU Kiel, Kaiserstr. 2, 24143, Kiel, Germany — 2Institute for Materials Science- Synthesis and Real Structure, CAU Kiel, Kaiserstr. 2, 24143, Kiel, Germany — 3Dept. of Prosthodontics, Propaedeutics and Dental Materials, CAU Kiel , Arnold-Heller-Str. 3, 24105, Kiel, Germany
Reactive sputtering of silver/titania nanocomposites is potentially attractive for antibacterial coatings based on the release of silver ions. Previous studies on such coatings showed strong segregation of silver towards the surface. Surface segregation leads to rapid depletion of the Ag in humid invironment and prevents tailoring of the release properties. In this work, the influence of sputter parameters on the morphology and subsequent silver ion release properties of reactively sputtered silver/ TiOx nanocomposites was investigated. It was observed that silver surface segregation is largely independent of the oxygen partial pressure used in the sputtering process and that - unlike in nonreactive sputtering of TiOx - even sputtering of pure TiOx barriers at moderate deposition rates is not sufficient to prevent the strong surface segregation. Surface segregation is significantly reduced for silver filling factors below a critical silver content of 9% and can be further be reduced by deposition of TiOx barriers with high sputtering rates.