Regensburg 2013 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 5: Functional Materials - Battery Materials I
MM 5.5: Vortrag
Montag, 11. März 2013, 11:15–11:30, H26
Thin film batteries based on LiPON thin films — •Susann Nowak, Frank Berkemeier, and Guido Schmitz — Universität Münster, Institut für Materialphysik, Wilhelm-Klemm-Str. 10, 48149 Münster
We present the preparation of a complete thin film solid state lithium-ion battery by depositing a LiPON (lithium phosphorus oxynitride, Li3Nx(PO4)1−x) layer between two metallic thin film electrodes on silicon. It is shown that during the first cycle of cyclic voltammetry measurements, electrochemically active interface regions are formed, serving as anode and cathode, respectively, and thus the layer stack acts as a complete electrochemical thin-film cell. These cells are investigated by means of temperature-dependent electrochemical impedance spectroscopy (EIS) and transmission electron microscopy (TEM), with special emphasis on the reactive layer between metallic electrode and LiPON. A whole typical battery (excluding the substrate) is just about 700 nm thick. To achieve such a thin geometry very smooth layer surfaces are necessary, which are prepared by reactive ion-beam sputtering of Li3PO4, using argon as sputter gas and nitrogen as reactive additive.
Due to their well-defined geometry, these samples are well suited to study interface reactions, with the aim to further improve lithium-ion batteries.