Regensburg 2013 – scientific programme
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MM: Fachverband Metall- und Materialphysik
MM 9: Functional Materials - Battery Materials II
MM 9.1: Talk
Monday, March 11, 2013, 11:45–12:00, H26
New Approach to Deposit Functional Thin-Films for Battery Application: CO2-Laser Assisted Chemical Vapor Deposition — •Christoph Loho1,2, Azad Darbandi1,2, Ruzica Djenadic1,2,3, and Horst Hahn1,2,3 — 1Joint Research Laboratory Nanomaterials, Technical University of Darmstadt and Karlsruhe Institute of Technology, Germany — 2Institute for Nanotechnology, Karlsruhe Institute of Technology, Germany — 3Helmholtz Institute Ulm, Germany
The research on thin-film batteries is driven by an increasing demand for micro-sized power sources, because of the progressive miniaturization of electronic components over the last decades. Especially an all-solid-state thin-film battery is desirable, since its excellent safety properties and easy integration in microelectronics, e.g. in RFID tags, are outstanding advantages.
In this presentation we report on a new established technique to deposit functional thin-films for battery application. This CO2-laser assisted chemical vapor deposition (LACVD) makes use of solid precursors, which evaporate instantaneously by absorption of microwave laser radiation. The deposition of the thin-films, acting as cathode, anode or solid-state electrolyte, then takes place on a diode laser heated substrate. By tuning the process parameters several structural features, such as the degree of crystallinity, density and thickness of the films can be adjusted. As one prominent example, a thin film of LiCoO2 was deposited onto a platinum substrate and electrochemically characterized. Further investigations comprise X-ray diffraction (XRD), Raman spectroscopy as well as scanning electron microscopy (SEM).