Regensburg 2013 – scientific programme

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O: Fachverband Oberflächenphysik

O 10: Nanostructures at Surfaces I

O 10.3: Talk

Monday, March 11, 2013, 11:00–11:15, H45

Nanopatterning of Cu(111)/Cu2O by Focused Electron Beam Induced Processing — •Martin Drost, Fan Tu, Esther Carrasco-Burgos, Matthias Franke, Florian Vollnhals, Hans-Peter Steinrück, and Hubertus Marbach — Lehrstuhl für Physikalische Chemie II, Universität Erlangen-Nürnberg, Egerlandstr. 3, D-91058

The fabrication of well-defined nanostructures on surfaces is an important goal in scientific research and technology. One can distinguish two general approaches: the bottom-up route, e.g., based on the self-assembly of molecules, and top-down methods like electron beam lithography to generate arbitrarily shaped structures. We target the combination of both by applying Focused Electron Beam Induced Processing (FEBIP) on a Cu(111)/Cu2O surface to fabricate nanoscaled templates for the directed self-assembly of functional molecules. The interaction with the defined controlled electron beam induces chemical changes on the oxide surface on the nanometer scale. The feasibility of this approach was investigated by a combination of Scanning Electron Microscopy (SEM), Scanning Tunneling Microscopy (STM) and Auger Electron Spectroscopy (AES). Latest results will be presented and discussed.