Regensburg 2013 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 22: Nanostructures at Surfaces II

O 22.5: Vortrag

Montag, 11. März 2013, 17:00–17:15, H45

Highly resolved KPFM investigations on gold and silver nano-dot arrays on silicon — •Anne-D. Müller¹, Yan Mi², Kin-Mun Wong², Falk Müller¹, and Yong Lei² — ¹Anfatec Instruments AG, Melanchthonstr. 28, 08606 Oelsnitz, Germany — ²TU Ilmenau, Institute of Physics & INM (ZIK), Threedimensional Nanostructuring, 98684 Ilmenau, Germany

This contibution demonstrates highly resolved Kelvin Probe Force Microscopy (KPFM) results and EFM on ordered gold and silver quantum dot arrays deposited in a template structure on silicon. These quantum dots exhibit a one by one relation between dot spacing and dot diameter and are almost as wide as high. As the quality and quantifiablility of KPFM results usually strongly is influenced by topographical features, the KPFM investigation of such samples usually should not produce reliable results. This contribution demonstrates that due to the usage of specialized cantilevers, KPFM measurements with less than 10 nm resolution are possible on such topographically complicated samples.