Regensburg 2013 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 36: Poster Session II (Organic films and electronics, photoorganics; Nanostructures; Plasmonics and nanooptics, Surface chemical reactions and heterogeneous catalysis, Surface dynamics )
O 36.75: Poster
Dienstag, 12. März 2013, 18:15–21:45, Poster B2
Clusters from Focused Ion Beams – High-resolution mass spectroscopy of Liquid Metal Ion Sources — •Martin Wortmann, Dirk Reuter, and Andreas D. Wieck — Ruhr-Universität Bochum, Universitätsstr. 150, 44780 Bochum
The Liquid Metal Ion Source (LMIS) is by far the most commonly used source type for Focused Ion Beam (FIB) applications. But the expected abundance of clusters from these sources also makes them a promising tool for the preparation of mass selected clusters.
For the investigation of the emission characteristics, the resolution of the FIB-system-built-in mass filters is normally the limiting factor. The resolution of the commonly employed E × B – filters decreases with the mass of the clusters and therefore it has so far been impossible to measure the abundance of clusters, which are composed of more than 10 atoms.
Recently, a high resolution mass spectrometer for measuring the emission characteristics of LMIS has been built and set into operation. The resolution of the measurement setup is sufficient for accomplishing mass separation for clusters with masses above 2000 amu. Small clusters can even be analyzed regarding their composition of different isotopes. In this contribution, technical details of the mass spectrometer and results of the first measurements are presented.