Regensburg 2013 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 44: Scanning Probe Methods I

O 44.4: Vortrag

Mittwoch, 13. März 2013, 11:15–11:30, H33

Development of a Quattro-Cantilever Microscope for topological and electrical measurements — Robert Benzig¹, Marcus Kästner¹, Tzvetan Ivanov¹, Manuel Hofer¹, •Anne-D. Müller², Falk Müller², and Ivo W. Rangelow¹ — ¹TU Ilmenau, Fakultät für Elektrotechnik und Informationstechnik, Institut für Mikro- und Nano-Elektronik, 98693 Ilmenau, Germany — ²Anfatec Instruments AG, Melanchthonstr. 28, 08606 Oelsnitz/V., Germany

In the past 15 years, extended developments of AFMs continually have involved multiple cantilever designs that allow the simultaneous operation of more than one AFM tip with the aim to speed up the image acquisition or to use different tips for different purposes [1]. This contribution introduces a thermally driven self-sensing four cantilever array and its application based on an extendable experimental set-up. Each cantilever is operated with an independent dynamic mode feedback while the vertical movement range is about 1.2 µm and connected to dedicated feedback loops. In addition, a master feedback loop operates a standard AFM scanner with 5 µm vertical range. The contribution explains the technical details of the cantilever array, fabrication technology and the experimental set-up. We will demonstrate the simultaneous operation of all four cantilevers (so-called Quattro-Cantilever-Chip).