Regensburg 2013 – scientific programme

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O: Fachverband Oberflächenphysik

O 53: Scanning Probe Methods II

O 53.12: Talk

Wednesday, March 13, 2013, 18:45–19:00, H31

Scanning Microwave Microscopy combined with Amplitude Modulation Atomic Force Microscopy — •Matthias A. Fenner — Agilent Technologies, Lyoner Str. 20, 60528 Frankfurt

We report the implementation of a Scanning Microwave Microscopy (SMM) in Amplitude Modulation Atomic Force Microscopy (AFM) [1]. SMM combines AFM and a Vector Network Analyzer using microwave tip sample interactions to characterize dielectric and electronic material properties on the nanometer scale. The method employs contact mode AFM to yield calibrated capacitance and dopant density values and is described in detail by Huber et al. [2].

The extension of the method to Amplitude Modulation AFM offers several benefits:

1. It can be applied to very soft matter or nanosize objects which are poorly bound to a substrate surface.

2. It can be combined with advanced AC mode techniques like Kelvin Force Microscopy for surface potential measurements or Magnetic Force Microscopy.

We report a feasibility study for this novel technique.

[1] Amplitude Modulation Atomic Force Microscopy, R. Garcia, Wiley-VCH (2010)

[2] H. P. Huber et. al, Rev. Sci. Instrum. 81, 113701 (2010)