Berlin 2014 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 13: Poster Session - Diagnostics

P 13.8: Poster

Dienstag, 18. März 2014, 16:30–18:30, SPA Foyer

Determination of non-Maxwellian EEDFs from the OES line-ratios in low-pressure plasmas containing argon and krypton — •Xi-Ming Zhu¹, Yusuf Celik¹, Sarah Siepa¹, Edmund Schüngel¹, Dirk Luggenhölscher¹, Yi-Kang Pu², and Uwe Czarnetzki¹ — ¹Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Germany — ²Department of Engineering Physics, Tsinghua University, Beijing 100084, People Republic of China

Optical emission spectroscopy is a non-invasive, convenient and widely-used diagnostic technique for the low-temperature plasmas, which is classically applied to obtain the electron temperature and density by assuming a Maxwellian electron energy distribution function (EEDF) [1]. However, non-Maxwellian EEDFs are formed in many plasmas with relatively low ionization ratios e.g. in inductive and capacitive plasmas, due to inelastic collisions with heavy particles, as well as sheath acceleration of secondary electrons from the electrodes [2].

In this work, we propose an OES line-ratio method that is aimed at obtaining non-Maxwellian EEDFs, with a collisional-radiative model for argon and krypton [3]. When applied for both a capacitive and an inductive plasma, this method provides satisfactory results compared with those measured by a Langmuir probe.

[1] X M Zhu and Y K Pu, J. Phys. D: Appl. Phys. 43, (2010) 403001

[2] V A Godyak, IEEE Trans. Plasma Sci. 34, (2006) 755

[3] X M Zhu, Y K Pu, Y Celik et al, Plasma Sources Sci. Technol. 21, (2012) 024003