Berlin 2014 – wissenschaftliches Programm
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P: Fachverband Plasmaphysik
P 19: Poster Session - Low Temperature Plasmas
P 19.8: Poster
Mittwoch, 19. März 2014, 16:30–18:30, SPA Foyer
Plasma parameter study of an inductively coupled radio frequency argon discharge — •C. Küllig, Th. Wegner, and J. Meichsner — Ernst-Moritz-Arndt-Universität, 17489 Greifswald
This contribution presents results of a comprehensive plasma parameter study of a 13.56 MHz inductively coupled radio frequency (ICRF) argon discharge. In particular, it will be discussed the behavior of the E- to H-mode transition. Thereby, it is considered the positive ion saturation current and floating potential, which were measured by a Langmuir probe. Furthermore, the line integrated electron density was measured by a 160 GHz microwave interferometer.
All parameters provide information about the E- to H-mode transition.
For instance the amount of the positive ion saturation current and the line integrated electron density increases from 10−5 to 10−3 A and from 1014 to 1017 m−2, respectively.
Whereby, the transition appears continuously for low pressure in contrast to the step-like behavior reported in literature.
Furthermore, the mode transition is discussed by the spatio-temporal excitation rate pattern of argon at 750 nm calculated from phase resolved optical emission spectroscopy (PROES). Thereby, the typical excitation due to electron heating during RF sheath expansion appears in the E-mode. This mode is comparable to a capacitively coupled RF argon plasma. In the H-mode no excitation rate patterns can be separated. Here the excitation patterns are blurred.
In addition, the hysteresis effect was studied and it was found an increasing hysteresis in the E-H-E-mode transition with raising pressure.
// Funded by the DFG CRC/Transregio 24, project B5.