Berlin 2014 – scientific programme

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Q: Fachverband Quantenoptik und Photonik

Q 30: Poster: Photonics, laser development and applications, ultrashort laser pulses, quantum effects

Q 30.31: Poster

Tuesday, March 18, 2014, 16:30–18:30, Spree-Palais

Direct Laser Writing of Singlemode Waveguides in SU-8 Photoresist for a Wavelength of 780nm — •Alexander Landowski, Michael Renner, Georg von Freymann, and Artur Widera — TU Kaiserslautern

Planar optical waveguides are essential for optical communication on a chip. Here we present the construction, characterization and simulation of polymer waveguide structures, fabricated by direct laser writing in a photoresist using a commercial system. We fabricated rectangular shaped single-mode waveguides with air-cladding and SU-8 core (MicroChem Corp.) on SiO₂ for a wavelength of 780nm. We have simulated the structure parameters in Lumerical FDTD (Finite Differential Time Domain) and we have characterized the written structures via raster electron microscopy and differential interference microscopy. We present optimal parameters for stable waveguides extending to approx. 7mm.