Berlin 2014 – scientific programme
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Q: Fachverband Quantenoptik und Photonik
Q 33: Micromechanical oscillators
Q 33.1: Talk
Thursday, March 20, 2014, 10:30–10:45, DO24 1.101
Diamond High-Q Mechanical Resonators Integrated In On-Chip Mach-Zehnder-Interferometers — •Patrik Rath1, Sandeep Ummethala1, Georgia Lewes-Malandrakis2, Dietmar Brink2, Christoph Nebel2, and Wolfram Pernice1 — 1Institute of Nanotechnology, Karlsruhe Institute of Technology, 76344 Eggenstein-Leopoldshafen, Germany — 2Fraunhofer Institute for Applied Solid State Physics, Tullastr. 72, 79108 Freiburg, Germany
Optical circuits made from diamond-on-insulator (DOI) thin films are used to fabricate integrated Mach-Zehnder-Interferometers (MZIs) [1]. Via chemomechanical polishing the surface roughness of the polycrystalline diamond films is reduced below 3 nm, allowing for high resolution e-beam lithography. Using the DOI platform hundreds of devices can be fabricated on one chip allowing to sweep several geometric parameters [2]. The high sensitivity of the MZIs in the fm/(Hz^1/2) range allows detecting the thermomechanical motion of evanescently coupled mechanical resonators. A fourfold clamped geometry was optimized and shows high mechanical Q factors up to 28.800 for mechanical resonators in the MHz regime.
[1] P. Rath, S. Khasminskaya, C. Nebel, C. Wild, W.H.P. Pernice, Diamond-integrated optomechanical circuits, Nature Communications. 4 (2013) 1690. [2] P. Rath, N. Gruhler, S. Khasminskaya, C. Nebel, C. Wild, W.H.P. Pernice, Waferscale nanophotonic circuits made from diamond-on-insulator substrates, Optics Express. 21 (2013) 11031.