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SYOT: Symposium Plasma und Optische Technologien

SYOT 3: SFB zu Plasma und Optische Technologien

SYOT 3.2: Hauptvortrag

Dienstag, 18. März 2014, 14:30–15:00, SPA Kapelle

From target to substrate in high power pulsed magnetron plasmas — •Achim von Keudell — Ruhr-Universität Bochum

The temporal distribution of the incident fluxes of argon and titanium ions on the substrate during an argon HiPIMS pulse to sputter titanium with pulse lengths between 50 µs to 400 µs and peak powers up to 80 kW is measured by energy-resolved ion mass spectrometry with a temporal resolution of 2 µs. The data are correlated with time-resolved growth rates and with phase resolved optical emission spectra. All energy distributions can be very well fitted with a shifted Maxwellian indicating an efficient thermalization of the energetic species on their travel form target to substrate. The energy of titanium is higher than that of argon, because they originate from energetic neutrals of the sputter process. The determination of the temporal sequence of species, energies and fluxes in HiPIMS may lead to design rules for the targeted generation of these discharges and for synchronized biasing concepts to further improve the capabilities of high power impulse magnetron sputtering processes.