Dresden 2014 – scientific programme
Parts | Days | Selection | Search | Updates | Downloads | Help
DS: Fachverband Dünne Schichten
DS 1: Application of Thin Films
DS 1.10: Talk
Monday, March 31, 2014, 12:00–12:15, CHE 91
Work function tuning of pyrolytic carbon electrodes and integration in nanoelectronic devices. — •Andreas Krause1, Andrew Graham1, Thomas Mikolajick1,2, and Walter M. Weber1 — 1namlab gGmbh, D-01187 Dresden — 2Institut fuer Halbleiter- und Mikroelektronik IHM, TU Dresden
Pyrolytic carbon is an extraordinary material, which can be used as an electrode material for nanoelectronic device integration. The carbon layers have been grown by CVD below 900C. With a work function of 4.6 eV and high conformity, it poses a real alternative to standard TiN or other electrode materials. Composing of a polycrystalline mixture of graphite-like (sp2) and amorphous (sp3) carbon, it exhibits an metal ohmic behavior with 1.5 mΩ cm. The amount of graphite-like (conductive) proportions can be changed with the annealing temperature and easily controlled with Raman spectroscopy. The work function of 4.6 eV has been tuned in our experiments with the introduction of nitrogen as dopant to the surface layer. [Aichmayr et al., 2007 IEEE Symposium on VLSI Technology] [A. Graham et al., J. Appl. Phys. 2010, 107(11)] [A. Graham et al., J. Appl. Phys. 2010, 108(10)]