Dresden 2014 – scientific programme

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DS: Fachverband Dünne Schichten

DS 1: Application of Thin Films

DS 1.3: Talk

Monday, March 31, 2014, 10:00–10:15, CHE 91

Electrical resistivity of high-conductivity perovskite SrMoO₃ at microwave frequencies — •Arzhang Mani¹, Aldin Radetinac¹, Mohammad Nikfalazar², Sergiy Melnyk², Philipp Komissinskiy¹, Yuliang Zheng², Rolf Jakoby², and Lambert Alff¹ — ¹Institute of Material Science, Technische Universität Darmstadt, Alarich-Weiss-Straße 2, 64287 Darmstadt, Germany — ²Institut of Microwave Engineering, Technische Universität Darmstadt, Merckstraße 25, 64283 Darmstadt, Germany

Epitaxial SrMoO₃ thin films were grown on single crystal GdScO₃ (110) substrates using pulsed laser deposition (PLD). The lithography process of SrMoO₃ thin films for patterning the co-planar waveguide (CPW) structures is challenging due to the high oxygen affinity of SrMoO₃. However, successful patterning of SrMoO₃ electrodes for electrical measurements by means of lithography and wet etching was achieved. Making a comparison between the electrical resistivity of SrMoO₃ and SrRuO₃ as a common oxide electrode material, we show that SrMoO₃ exhibits a record-low DC resistivity of 27 µΩcm at room-temperature. Furthermore, SrMoO₃ exhibits an AC resistivity of 27 µΩcm in the range of 1-20 GHz, making it the best candidate for integration into all-oxide electronic devices for microwave applications.