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DS: Fachverband Dünne Schichten
DS 11: Focus Session: Sensoric Micro and Nano-systems I
DS 11.6: Hauptvortrag
Dienstag, 1. April 2014, 11:15–11:45, CHE 89
Carbon nanotubes for piezoresistive electro-mechanical transducers incorporating a wafer-level technology — •Sascha Hermann1, Alexey Shaporin1, Jens Bonitz2, Steffen Hartmann1, Jana Kalbacova3, Raul D. Rodriguez3, Dietrich R.T. Zahn3, Jan Mehner1, Bernhard Wunderle1, Stefan E. Schulz1,2, and Thomas Gessner1,2 — 1Technische Universität Chemnitz, Center for Microtechnologies (ZfM), 09126 Chemnitz, Germany — 2Fraunhofer Institute for Electronic Nano Systems (ENAS), 09126 Chemnitz, Germany — 3Technische Universität Chemnitz, Institute of Physics, Semiconductor Physics, 09126 Chemnitz, Germany
Single-walled carbon nanotubes (SWCNTs) can exhibit a distinctive intrinsic piezoresistivity exploitable in ultra sensitive displacement and force sensors. Driven by this potential, we present our progress on the integration of suspended SWCNT arrays into microelectromechanical systems (MEMS). Thereby we focus on application oriented wafer-level technologies. Aspects like a reliable electrical/mechanical contact, chirality distribution of SWCNTs, as well defect density and impurities are addressed in this work. Therefore a MEMS test stage is going to be presented which enables an extended electrical and structural characterization of suspended SWCNTs and other 1D nanomaterials under strain, as well as a mechanical reliability test. Furthermore, we investigate the local chiral distribution of SWCNTs as well as the structural and electrical properties of SWCNTs under strain.