Dresden 2014 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 16: Focus Session: Sensoric Micro and Nano-systems II
DS 16.2: Vortrag
Dienstag, 1. April 2014, 14:30–14:45, CHE 89
Fabrication and characterization of nano-crystalline graphite/graphene membranes — •Andreas Geworski, Yuri Koval, and Paul Müller — Department of Physics and Interdisciplinary Center for Molecular Materials, Universität Erlangen
The newly emerging field of carbon-based micro electro-mechanical systems (C-MEMS) tries to utilize the diverse properties of carbon and to push the performance of MEMS devices further. We have developed a method to fabricate suspended micro and nano structures made of nanocrystalline graphite/graphene. The preparation includes low-energy ion irradiation and electron beam lithography at different electron energies. Two different polymers were used as precursors for the membrane fabrication: novolac and poly(methyl methacrylate) (PMMA). Both materials demonstrate similar results except for the thickness of the membranes, which is smaller for PMMA. The thickness of the nanocrystalline suspended membranes can be varied between 2 and 100 nm by process parameters. The membranes show outstanding thermal properties and stay intact even at more than 3000 oC in vacuum. A fine adjustment of the electrical conductivity of the membranes can be performed by an additional ion irradiation [1]. A sheet conductance as high as 10−3 S can be achieved. The conductance of the membranes can be varied by a gate electrode [2]. An integration of electrostatic actuation and field effect transistor effect opens a pathway for novel devices. [1] Y. Koval, I. Lazareva, P. Müller, Synthetic Metals 161 (2011) 528. [2] Y. Koval, I. Lazareva, P. Müller, Phys. Stat. Solidi (B) 248 (2011) 299.