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DS: Fachverband Dünne Schichten

DS 16: Focus Session: Sensoric Micro and Nano-systems II

DS 16.5: Vortrag

Dienstag, 1. April 2014, 15:15–15:30, CHE 89

Building Blocks of a Micro and Nano Scale Tensile Testing Platform: Design, Technology, Numerical Simulation and Optimization — •Peter Meszmer, Karla Hiller, Raul David Rodriguez, Daniel May, Alexey Shaporin, Dietrich R. T. Zahn, Jan Mehner, and Bernhard Wunderle — Technische Universität Chemnitz, Germany

The presented tensile testing system targets to characterize functional sensor subcomponents such as CNTs, smart tubes, membrane structures, nanowires and their respective interconnections under thermo-mechanical loads to enable reliability predictions. The platform consists of three parts besides the specimen: actuator, force sensor and displacement sensor, integrated into a singe chip.

The thermal actuator is designed to ensure electrical insulation against the other components of the platform, passively heated using a thin aluminum meander, thus enabling the integration of all components, providing a travel range of up to 1µ m.

The displacement sensor is based on capacitive sensing, providing a resolution of 4fF and a sensitivity of 3fF/nm.

The MEMS force sensor is based on the piezoresistive effect, capable of measuring nano-Newton sized forces mapped onto a micro-Volt scale and able to measure continuously while different loads are applied to the specimen.

All components are fabricated using SOI wafers processed by a BDRIE method, provide electrical readout and drive, are optimized using numerical methods providing experimentally verified results.