Dresden 2014 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 16: Focus Session: Sensoric Micro and Nano-systems II
DS 16.7: Vortrag
Dienstag, 1. April 2014, 15:45–16:00, CHE 89
Multifunctional nanomembranes as sensitive optical sensors in compact MEMS devices — •Stefan M. Harazim1, Vladimir Bolaños1, Christian Helke3, Tom Enderlein3, Thomas Otto2, Thomas Gessner2,3, and Oliver G. Schmidt1,4 — 1IFW Dresden, Helmholtzstraße 20, 01069 Dresden, Germany — 2Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany — 3TU Chemnitz, Zentrum für Mikrotechnologien, Reichenhainer Str. 70, 09126 Chemnitz, Germany — 4TU Chemnitz, Material Systems for Nanoelectronics, Reichenhainer Str. 70, 09107 Chemnitz, Germany
Point of care (PoC) diagnostic is a method to test biological samples directly where the patient is. This method offers, compared to the slow and large stationary laboratory, the most spatial flexibility and is very efficient if not preservable, quickly perishable samples have to be analyzed. Micro-electro-mechanical systems (MEMS), especially Lab-on-a-Chip (LoC) systems, could be utilized to include all required process steps, starting from the sample preparation up to the analysis of the recorded data. Furthermore, if it is possible to develop a sensor and actuator technology, providing a broad spectrum of biomedical applications, that enables the fabrication of low cost and fast operational one-time analysis tools, a huge leap towards PoC diagnostic is done. Herein, we present the fabrication and microfluidic integration in a LoC system of easy and fast to fabricate multifunctional nanomembranes. The refractrometric sensor capabilities, signal stability, complete devices with sensitivities of up to 880 nm/refractive index unit (RIU), reliability and other key parameters of the device will be presented.