Dresden 2014 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 30: Focus Session: Emerging oxide semiconductors II (jointly with HL, DF, O)
DS 30.2: Vortrag
Mittwoch, 2. April 2014, 15:30–15:45, POT 081
Dielectric function of In2O3 from the mid-infrared into the vacuum ultraviolet — •Rüdiger Goldhahn1, Jakob Nixdorf1, Christian Lidig1, Klaus Irmscher2, Zbigniew Gałazka2, Oliver Bierwagen3,4, James S. Speck4, Christoph Cobet5, and Martin Feneberg1 — 1Institut für Experimentelle Physik, Otto-von-Guericke-Universität Magdeburg — 2Leibniz-Institut für Kristallzüchtung, Berlin — 3Paul Drude Institut für Festkörperelektronik — 4University of California, Santa Barbara — 5Johannes Kepler Universität, Linz
The optical properties of cubic bixbyite In2O3 are under intense discussion. There is not even a consensus about the direct or indirect nature of the fundamental band gap and the corresponding energies. Here, we present spectroscopic ellipsometry from the phonon region in the mid-infrared up to 10 eV using several different instruments including synchrotron radiation. The studies comprise bulk (111) crystals and epitaxial (001) thin films on (001) yttria-stabilized zirconia covering a wide range of electron concentrations (Ns). The dielectric function of In2O3 at high energies exhibits pronounced features related to critical points. By analyzing certain peculiarities of ellipsometric data, the fundamental band gap energy to be 2.77 ± 0.02 eV for low Ns. A continuous Burstein-Moss shift is found for increasing Ns. The analysis of the plasma frequency yields an electron effective mass of about 0.23 m0.