Dresden 2014 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 35: Poster I: Application of thin films; Focus session: Sensoric micro and nano-systems; Focus Session: Sustainable photovoltaics with earth abundant materials; Graphen (joint session with TT; MA; HL; DY; O); Ion and electron beam induced processes; Layer properties: electrical, optical, and mechanical properties; Magnetic/organic interfaces, spins in organics and molecular magnetism; Micro- and nanopatterning (jointly with O); Organic electronics and photovoltaics (jointly with CPP, HL, O); Thermoelectric materials

DS 35.13: Poster

Mittwoch, 2. April 2014, 17:00–20:00, P1

Nano Microphone — •Martin Bohrisch¹, Xianghui Zhang², Thomas Weimann¹, and Armin Gölzhäuser² — ¹Physikalisch-Technische Bundesanstalt, 38116 Braunschweig, Germany — ²Fakultät für Physik, Universität Bielefeld, 33615 Bielefeld, Germany

We plan to build and test a nano microphone that utilizes a 1 nm thick carbon nanomembrane (CNM) as a sensitive diaphragm. The CNM is made by electron induced crosslinking of aromatic self-assembled monolayers. To convert oscillations of the CNM into electrical signals, we have to integrate the molecular CNMs and electronic circuits into a functional nano electro- mechanical system (NEMS). The operation principle is based on a field effect transistor (FET). A freestanding conductive diaphragm is placed over the source-drain-channel of the FET and acts as flexible gate-electrode. Accordingly an oscillation of the membrane leads to an AC signal of the source-drain-current. Our objective is to build a prototype that will be used for sound measurements in air and water; it will be tested for spatially and timely resolved sound detection. The proof-of-concept experiments and first results of CNM-gated FETs will be presented.