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DS: Fachverband Dünne Schichten
DS 35: Poster I: Application of thin films; Focus session: Sensoric micro and nano-systems; Focus Session: Sustainable photovoltaics with earth abundant materials; Graphen (joint session with TT; MA; HL; DY; O); Ion and electron beam induced processes; Layer properties: electrical, optical, and mechanical properties; Magnetic/organic interfaces, spins in organics and molecular magnetism; Micro- and nanopatterning (jointly with O); Organic electronics and photovoltaics (jointly with CPP, HL, O); Thermoelectric materials
DS 35.17: Poster
Wednesday, April 2, 2014, 17:00–20:00, P1
Wafer-Level Functionalization of Carbon Nanomaterials with Metal Nanoparticles — •Thomas Blaudeck1, David Adner2, Sascha Hermann1, Youwei Zhang1,3, Stefan E. Schulz4, Ran Liu3, Heinrich Lang2, and Thomas Geßner1 — 1TU Chemnitz, Zentrum für Mikrotechnologien (ZfM), 09107 Chemnitz, Germany — 2TU Chemnitz, Inorganic Chemistry, 09107 Chemnitz, Germany — 3Fudan University, School of Microelectronics, Fudan, P. R. China — 4Fraunhofer ENAS, 09126 Chemnitz, Germany
We report about different technical approaches for an on-chip functionalization of single-walled carbon nanotubes (SWCNTs) with metal nanoparticles after electrokinetic deposition of individualized SWCNTs in the configuration of a CNT-based field effect transistor (CNT-FETs) for sensor applications. Based on a side-wall functionalization of the SWCNTs with (R-)oxocarbonylnitrene linkers according to Holzinger et al. [1] we extended the protocols towards long-chained ethylene glycol units for an effective deposition of nanoparticles. Characterization of the precursor included IR, Raman and NMR spectroscopy, the functionalized CNT-FETs were analyzed with morphological (AFM, Raman) and electric characterization . For the on-chip functionalization on silicon wafers (150 mm diameter), a microfluidic tool on a controlled heating stage was designed and applied on the integrated SWCNTs on a silicon wafer. Our experiments show that a selective functionalization of the SWCNTs with gold nanoparticles is possible. Results for other carbon-based nanomaterials are discussed.
[1] M. Holzinger et al., J. Am. Chem. Soc. 125, 8566-8580 (2003).