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DS: Fachverband Dünne Schichten

DS 35: Poster I: Application of thin films; Focus session: Sensoric micro and nano-systems; Focus Session: Sustainable photovoltaics with earth abundant materials; Graphen (joint session with TT; MA; HL; DY; O); Ion and electron beam induced processes; Layer properties: electrical, optical, and mechanical properties; Magnetic/organic interfaces, spins in organics and molecular magnetism; Micro- and nanopatterning (jointly with O); Organic electronics and photovoltaics (jointly with CPP, HL, O); Thermoelectric materials

DS 35.29: Poster

Mittwoch, 2. April 2014, 17:00–20:00, P1

Temperature Dependent Electrical Charge Carrier Mobility and Concentration Measurements of Spin Coated Silicon Films — •Daniel Bülz, Michael Fronk, Ronny Fritzsche, Michael Mehring, Georgeta Salvan, and Dietrich R. T. Zahn — TU Chemnitz, 09126 Chemnitz, Germany

Nowadays many different methods for the production of silicon films are investigated. The main goal of these techniques is to lower the production costs and increase the production speed. For electronic applications the charge carrier mobility is a crucial parameter. This can be obtained from electrical Hall and conductivity measurements. Here a magneto-optical Oxford Spectromag Cryostat was upgraded with electrical wirings for electrical Hall and four point probe measurements in order to enable the determination of the charge carrier mobility and concentration. Furthermore, the Spectromag Cryostat offers the possibility of illuminating the sample to investigate the mobility of light induced charge carriers. The system is tested with an n-doped standard silicon wafer sample. Finally, the temperature dependent charge carrier mobility of silicon films is measured. For this purpose, the silicon films are prepared by spin coating of a Si-precursor (neopentasilane). After deposition the films are thermally treated to form amorphous silicon films.