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Dresden 2014 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 35: Poster I: Application of thin films; Focus session: Sensoric micro and nano-systems; Focus Session: Sustainable photovoltaics with earth abundant materials; Graphen (joint session with TT; MA; HL; DY; O); Ion and electron beam induced processes; Layer properties: electrical, optical, and mechanical properties; Magnetic/organic interfaces, spins in organics and molecular magnetism; Micro- and nanopatterning (jointly with O); Organic electronics and photovoltaics (jointly with CPP, HL, O); Thermoelectric materials

DS 35.42: Poster

Mittwoch, 2. April 2014, 17:00–20:00, P1

Characterization of ZnxMg1−xO:Al thin films deposited by RF sputtering — •Philipp Schurig, Marc Dietrich, Philipp Hering, Angelika Polity, and Bruno K. Meyer — Justus-Liebig-Universität Gießen, 1. Physikalisches Institut, Giessen, Deutschland

ZnxMg1−xO:Al is a transparent conductive oxide-semiconductor (TCO) with a tunable band gap which can be used for example as a photovoltaic electrode material. For this application a wide band gap as well as good conductivity is necessary. The thin films were deposited by RF sputtering on c-sapphire and float glass substrates. A ceramic ZnO target with two weight percent Al2O3 and mounted Mg-stripes was used. The band gap can be controlled through the magnesium content between 3.3 and 7.8 eV. The influences of the magnesium content on structural, optical and electrical properties are investigated using XRD-, SEM-, transmission- and Hall-measurements.

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