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DS: Fachverband Dünne Schichten
DS 35: Poster I: Application of thin films; Focus session: Sensoric micro and nano-systems; Focus Session: Sustainable photovoltaics with earth abundant materials; Graphen (joint session with TT; MA; HL; DY; O); Ion and electron beam induced processes; Layer properties: electrical, optical, and mechanical properties; Magnetic/organic interfaces, spins in organics and molecular magnetism; Micro- and nanopatterning (jointly with O); Organic electronics and photovoltaics (jointly with CPP, HL, O); Thermoelectric materials
DS 35.4: Poster
Wednesday, April 2, 2014, 17:00–20:00, P1
LiPON electrolyte prepared by RF sputtering for solid state electrochromic and battery applications — •Yurong Su1, Jane Falgenhauer2, Matthias Geiß3, Benedikt Kramm1, Angelika Polity1, and Bruno K. Meyer1 — 1I. Physics Institute, Justus-Liebig-University Giessen, Heinrich-Buff-Ring 16, 35392 Giessen, Germany — 2Institute of Applied Physics, Justus-Liebig-University Giessen, Heinrich-Buff-Ring 16, 35392 Giessen, Germany — 3Institute of Physical Chemistry, Justus-Liebig-University Giessen, Heinrich-Buff-Ring 58, 35392 Giessen, Germany
Lithium phosphorus oxynitride (LiPON) is one of the promising solid state electrolytes which can be used in lithium batteries as well as all solid state electrochromic (EC) devices due to their relatively high ionic conductivity and better durability among oxides.In the present study, amorphous LiPON films were prepared by radio frequency (RF) magnetron sputtering of a Li3PO4 target in N2 atmosphere. The LiPON films were deposited by varying RF power and N2 pressure in order to evaluate the best deposition conditions. The composition of films was determined by ICP-OES and EDX. The structural, optical and electrochemical properties were characterized by XRD, XPS, UV-visible and impedance spectroscopy, respectively. The highest ionic conductivity at room temperature observed in this study was about 3.6×10−6Scm−1 with the activation energy of 0.47 eV. In addition the prepared LiPON films have good transparency in visible light region. This good performance of LiPON film may make it suitable both for solid state EC devices and battery applications.