Dresden 2014 – wissenschaftliches Programm

Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe

DS: Fachverband Dünne Schichten

DS 35: Poster I: Application of thin films; Focus session: Sensoric micro and nano-systems; Focus Session: Sustainable photovoltaics with earth abundant materials; Graphen (joint session with TT; MA; HL; DY; O); Ion and electron beam induced processes; Layer properties: electrical, optical, and mechanical properties; Magnetic/organic interfaces, spins in organics and molecular magnetism; Micro- and nanopatterning (jointly with O); Organic electronics and photovoltaics (jointly with CPP, HL, O); Thermoelectric materials

DS 35.51: Poster

Mittwoch, 2. April 2014, 17:00–20:00, P1

Laser-based fabrication of MEMS structures on flexible polymeric substrates — Satish Panchani, •Pierre Lorenz, Martin Ehrhardt, and Klaus Zimmer — Leibniz-Institut für Oberflächenmodifizierung e. V., Permoserstraße 15, 04315 Leipzig, Germany

Silicon has been a primary material for fabrication of microelectromechanical systems (MEMS) for several decades. However, MEMS devices on flexible substrates are important for non-planar and non-rigid surface applications. To support the rapid advancements of non-silicon MEMS it is necessary to introduce innovative techniques to process-different MEMS material. Numbers of techniques for polymer-based microactuations have been demonstrated in recent years. One promising microactuation technique is based on the bimetallic effect which relies on the thermal coefficient of expansion mismatch between two components of sandwiched layers to provide displacement with change in temperature. In this study, the laser-based fabrication of MEMS on the example of the bimetal system Al/Mo on polyimide was studied. The temperature dependence of the system was measured by white light interference microscopy (WLIM) and verified by comparison with finite element studies. Furthermore, the resultant structures were investigated by scanning electron microscopy (SEM).