Dresden 2014 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 47: Micro- and Nanopatterning (jointly with O)

DS 47.4: Vortrag

Freitag, 4. April 2014, 10:15–10:30, CHE 89

Redeposition during ion-beam erosion can stabilize well-ordered nanostructures — •Christian Diddens and Stefan J. Linz — Institut für Theoretische Physik, Westfälische Wilhelms-Universität Münster

We investigate the redeposition effect, i.e. the reattachment of eroded particles on the surface, in the context of self-organized pattern formation on semiconductor targets during ion-beam erosion. Within the framework of a continuum model for this non-local, inherently complicated process, we present (i) the distribution of redepositing particles on the surface, (ii) an approximation of the redeposition effect in terms of the surface height and (iii) the spatio-temporal evolution of one- [1] two-dimensional [2,3] surface morphologies subject to combined erosion and redeposition. We are able to conclude that an interplay of erosion, diffusion and redeposition can reproduce the hexagonally arranged nanodots found in experiments in extended regions of the parameter space.

[1] C. Diddens and S. J. Linz, Eur. Phys. J. B, 86 (2013) 397

[2] C. Diddens and S. J. Linz, EPL, 104 (2013) 17010

[3] C. Diddens and S. J. Linz, (in preparation)