Dresden 2014 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 51: Graphene (joint session with TT, MA, HL, DY, O)
DS 51.3: Vortrag
Freitag, 4. April 2014, 12:00–12:15, CHE 89
Characterization of single and few layer of molybdenum disulfide with spectroscopic imaging ellipsometry — •P. H. Thiesen1, B. Miller2, C. Röling1, E. Parzinger2, A. W. Holleitner2, and U. Wurstbauer2 — 1Accurion GmbH, Göttingen, Germany — 2Technische Universität München, Walter Schottky Institut, 85748 Garching, Germany
Molybdenum disulfide is a layered transition metal dichalcogenide. From the point of current research, 2D-materials based on MoS2 are very promising because of the special semiconducting properties. The bulk material has an indirect 1.2 eV electronic bandgap, but single layer MoS2 has a direct 1.8 eV bandgap. The monolayer can be used in prospective electronic devices like transistors or photo detectors. Like in the initial period of graphene research, the issue is to identify and characterize MoS2 crystallites of microscopic scale. Imaging ellipsometry is a nondestructive optical method in thin film metrology with a lateral resolution down to 1 micro meter. Imaging ellipsometry has been applied to characterize graphene flakes of few micrometer size [1],[2] and also to identify single layer steps in multilayer graphene/graphite stacks [3]. Delta and Psi Spectra of MoS2 monolayers as well as maps of the ellipsometric angles will be presented. The practical aspect of single layer identification will be addressed and the capability of ellipsometric contrast micrographs as a fast tool for single layer identification will be demonstrated. [1] Wurstbauer et al., Appl. Phys. Lett. 97, 231901 (2010) [2] Matkovic et al. J. Appl. Phys. 112, 123523 (2012) [3] Albrektsen et al. J. Appl. Phys. 111, 064305 (2012)