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DS: Fachverband Dünne Schichten
DS 6: Thin Film Characterization: Structure Analysis and Composition (XRD, TEM, XPS, SIMS, RBS,...)
DS 6.3: Vortrag
Montag, 31. März 2014, 15:30–15:45, CHE 89
RF-sputtering deposition of Ag: in-situ time-resolved GISAXS investigation — •Gonzalo Santoro1, Shun Yu1, Sarathlal K. Vayalil1, Ralph Döhrmann1, Daniel Mosegui-González2, Peter Müller-Buschbaum2, Margarita Hernández3, Concepción Domingo3, and Stephan V. Roth1 — 1DESY, Notkestr. 85, D-22607, Hamburg, Germany — 2TU München, Physik-Department, LS Funktionelle Materialien, James-Franck-Str. 1, D-85748, Garching, Germany — 3Institute of Structure of Matter, IEM-CSIC, Serrano 121-123, E-28006, Madrid, Spain
Ag nanocoatings have shown to exhibit excellent properties that can be exploited for applications such as antibacterial coatings, plasmonic devices or sensors [1-3]. However, in order to fully control the desired final properties of the nanocoatings, that are very sensitive to the morphology developed during the deposition, it is mandatory to achieve a profound understanding of the growth kinetics of Ag.
This work presents in-situ time-resolved Grazing Incidence Small Angle X-ray Scattering (GISAXS) results concerning the time evolution of the nanostructures developed during the RF-sputtering of Ag . The Surface Enhanced Raman Spectroscopy (SERS) activity of the prepared Ag coatings for different film thicknesses is also presented and correlated to their nanostructure.
[1] F. Faupel, et al., Adv.Eng. Mat. 12, 1177 (2010); [2] M. Rycenga, et al., Chemical Reviews 111, 3669 (2011); [3] J. Chen, et al., Biosens. Bioelectron. 44, 191 (2013).