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DS: Fachverband Dünne Schichten

DS 6: Thin Film Characterization: Structure Analysis and Composition (XRD, TEM, XPS, SIMS, RBS,...)

DS 6.7: Vortrag

Montag, 31. März 2014, 16:45–17:00, CHE 89

Spray pyrolysis of Mo-based nanostructures and thin films — •Marlis Ortel and Veit Wagner — School of Engineering and Science, Jacobs University Bremen, Campus Ring 1, 28759 Bremen

The high potential of Transition Metal Dichalgonides (TMD) in 2D electrical thin film devices was shown recently. A major bottle neck of the material system is the lack of suitable deposition methods for large-area applications. Up to now mainly electrical devices applying mechanical exfoliation have been reported.

In this work we report on spray pyrolysis of Mo-based nanostructures. Therefore concentration dependent ageing tests of the precursor solution (e.g. H2O, DMSO) were conducted in order to find an optimized starting solution. The layers were grown on silicon dioxide and mica substrates. The solvents utilized were altered with respect to Leidenfrost temperature, surface energy and solubility of the precursor material. Finally the material parameters were correlated with measurements conducted by AFM (atomic force microscopy) and SEM (scanning electron microscope) in order to investigate the physical mechanisms causing the growth of different types of nanostructures, i.e. layers or rods. A fluid mechanics based growth model was developed assuming colloidal growth of the nanostructures in the precursor.