DPG Phi
Verhandlungen
Verhandlungen
DPG

Dresden 2014 – scientific programme

Parts | Days | Selection | Search | Updates | Downloads | Help

HL: Fachverband Halbleiterphysik

HL 89: Metamorphic structures: Bringing together incompatible materials I (Focus session with DF)

HL 89.3: Talk

Thursday, April 3, 2014, 10:30–10:45, POT 251

Influence of the substrate quality on the structural properties of short-period GaN/AlGaN superlattices grown by MBE — •Felix Schubert1, Ulrich Merkel2, Thomas Mikolajick1,2, and Stefan Schmult21NaMLab gGmbH, Nöthnitzer Straße 64, D-01187 Dresden — 2Institute of Semiconductor and Microsystems, TU Dresden, Nöthnitzer Straße 64, D-01187 Dresden

Short-period AlGaN/GaN superlattices have been established as versatile test structures to investigate the influence of the GaN substrate quality on the structural properties of AlGaN/GaN heterostructures. Of particular interest are surface roughness, layer accuracy and aluminum mole fraction in the MBE-grown superlattices. A variety of GaN substrates prepared by MBE, MOCVD, HVPE and ammothermal growth was investigated. For the best substrate quality theoretically expected properties like narrow high-order satellite peaks and interface fringes can be recovered from high resolution x-ray diffraction scans of the superlattices.

100% | Mobile Layout | Deutsche Version | Contact/Imprint/Privacy
DPG-Physik > DPG-Verhandlungen > 2014 > Dresden