Dresden 2014 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 28: Nanomaterials I - Synthesis of advanced nanostructures
MM 28.4: Vortrag
Dienstag, 1. April 2014, 12:45–13:00, IFW A
Multiple scribing via diffusion-assisted direct laser writing — •Ioanna Sakellari1, Jae-Hyuck Yoo2, David Gray3, Maria Vamvakaki3, Nikita Bityurin4, Alexander Pikulin4, Costas Grigoropoulos2, and Maria Farsari3 — 1Univercity of Stuttgart, Stuttgart, Germany — 2Univercity of California, Berkeley, USA — 3Institute of Electronic Structure and Laser, Heraklion, Greece — 4Russian Academy of Sciences, Nizhnii Novgorod, Russia
Direct Laser Writing by Two-Photon Polymerization is a versatile technique for the creation of solid 3D polymer nanostructures for photonics, biomedical and microfluidic applications. By employing laser intensities that are only slightly above the nonlinear polymerization threshold, structures with resolution of 100nm can be fabricated. In this work, we report our recent results on resolution improvement of DLW by exploiting the diffusion of a mobile quenching molecule in the scanned area. By employing a multiple scribing method, we exploit the resulted depletion of the multi-photon generated radicals in between the scans allowing the fabrication of high resolution structures. The material used is an organic-inorganic hybrid composite containing a zirconium based hybrid, while the quencher used is also a photo-polymerizable monomer that becomes part of the polymer backbone upon fabrication. 3D woodpile structures with lateral spatial resolution of 70nm and rod spacing of 300nm are successfully fabricated. Optical characterization of the fabricated structures clearly shows that they exhibit stop gaps down to visible wavelengths, while well-ordered diffraction patterns obtained reveal high quality samples.