Dresden 2014 – scientific programme

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MM: Fachverband Metall- und Materialphysik

MM 64: Topical session: X-ray and neutron scattering in materials science V - X-ray Nanodiffraction Characterization of Inhomogeneous Structural and Mechanical Properties of Thin Films

MM 64.1: Topical Talk

Friday, April 4, 2014, 10:15–10:45, BAR 205

X-ray Nanodiffraction Characterization of Inhomogeneous Structural and Mechanical Properties of Thin Films — •Jozef Keckes — Department of Materials Physics, Montanuniversität Leoben, 8700 Leoben, Austria

Nanocrystalline and nanostructured thin films with grain size below 100nm exhibit typically inhomogeneous depth gradients of microstructure, strain and physical properties varying at the nano-scale. Currently, however, it is not trivial to reveal how these gradients relate to the macroscopic film behaviour. In this contribution, our recent results from position-resolved cross-sectional X-ray nanodiffraction studies of microstructure and strain in nanocrystalline films performed using monochromatic beams with diameters down to 50nm will be presented. On the examples of hard nitride coatings and metallic thin films, it will be demonstrated that the newly developed approaches can be used to analyse lateral- and thickness-dependent gradients of residual stress, crystallographic texture, phases and grain size with sub-micron resolution. Additionally, results from mechanical tests obtained from bending experiments on micro-cantilevers will be used to illustrate variability and anisotropy of mechanical properties in nanocrystalline coatings.