Dresden 2014 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 20: Nanostructures at Surfaces II

O 20.4: Vortrag

Montag, 31. März 2014, 16:45–17:00, WIL B321

STXM and NEXAFS study of the autocatalytic growth of EBID precursors — •Florian Vollnhals, Fan Tu, Martin Drost, Esther Carrasco, Andreas Späth, Hans-Peter Steinrück, and Hubertus Marbach — Lehrstuhl für Physikalische Chemie II, Friedrich-Alexander Universität Erlangen-Nürnberg, Egerlandstr. 3, D-91058, Erlangen, Germany

Electron beam induced deposition (EBID) is a technique for the direct fabrication of nanostructures on surfaces with full lithographic control.^[1] In EBID, a metal-organic precursor is adsorbed on a surface and locally decomposed by a highly focused electron beam. Non-volatile fragments form a deposit while volatile ones are pumped off.

The generally low purity of the deposits is a major challenge. In the case of Fe(CO)₅, the high attainable purity of 95+ %at. is linked to autocatalytic decomposition and subsequent growth of the Fe seeds at RT.^[2] To study this behavior, which is also expected for other precursors, we prepared EBI deposits from Fe(CO)₅ and Co(CO)₃NO on Si₃N₄ membranes in UHV and used STXM and NEXAFS to find that Fe(CO)₅ gives rise to linear growth of nearly pure Fe, while the behavior of Co(CO)₃NO is complex and yields oxygen rich CoC_xN_yO_z.

Supported by the DFG via grant MA 4246/1-2, MA 4246/2-1, the excellence cluster Engineering of Advanced Materials of the FAU Erlangen-Nürnberg and two granted beamtimes at the PolLux STXM at the Swiss Light Source.

^[1] W. van Dorp et al., J. Appl. Phys. 104 (2008), 0801301.

^[2] M.-M. Walz et al., Angew. Chem. Int. Ed. 49 (2010), 4669.