Dresden 2014 – wissenschaftliches Programm

Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe

O: Fachverband Oberflächenphysik

O 37: Posters: Plasmonics, Electronic Structure and Spin-Orbit Interaction, Semiconductor and Insulator Surfaces, Nanostructures

O 37.102: Poster

Dienstag, 1. April 2014, 18:30–22:00, P2

A Ruler for the Nanoworld: Scatterometry at the PTB — •Victor Soltwisch, Anton Haase, Jan Wernecke, and Frank Scholze — Physikalisch-Technische Bundesanstalt

The continuous shrinking in feature size in industrial application is a huge challenge under metrology aspects. In- and ex-situ metrology solutions are needed which are fast enough, non-destructive and have capabilities for 3D structures. The PTB operates several Beamlines at BESSYII and the new MLS, with different endstations designed for highest accuracy of scatterometric measurements. EUV and GISAXS scatterometry is a part of the optical scatterometry (OCD) solutions. EUV scatterometry is designed for the next step in photolithography in the semiconductor industry with wavelengths around 13.5 nm. Scattering from surfaces enables to reconstruct geometric parameters from nm structured surfaces. The study of off-specular scattering from multilayers gives insight in the interface roughness. We present several practical application of different scatterometric experiments which were performed at the PTB.